Micromachines – An Open Access Journal on Microelectromechanical Systems (MEMS)
نویسندگان
چکیده
منابع مشابه
Micromachines - An Open Access Journal on Microelectromechanical Systems (MEMS)
at MIT in 1988, I saw the first video of the earliest rotating silicon micromotor. It was the beginning of a high-time of microelectromechanical systems (MEMS): everything we did was new [1], and the MEMS community was sure that we not only reached a new frontier (which might be true), but that overcoming this boundary would lead to solutions for the most pressing problems of human kind [2] (wh...
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Micromachining and micro-electromechanical system (MEMS) technologies can be used to produce complex structures, devices and systems on the scale of micrometers. Initially micromachining techniques were borrowed directly from the integrated circuit (IC) industry, but now many unique MEMS-specific micromachining processes are being developed. In MEMS, a wide variety of transduction mechanisms ca...
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ژورنال
عنوان ژورنال: Micromachines
سال: 2010
ISSN: 2072-666X
DOI: 10.3390/mi1020034